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Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic
Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Emb...
Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic

Detailed Information

자료유형  
 보고서
ISSN  
12297801
서명/저자  
Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic / Jong-Chae Kim ; Yeong-Cheol Kim ; Jun-Ho Choy
발행사항  
서울 : 한국세라믹학회, 2001.
형태사항  
pp. 782
키워드  
EFFECTS TI TIN CAPPING LAYERS COBALTSILICIDED MOS DEVICE CHARACTERISTICS EMBEDDED DRAM LOGIC
기타저자  
Jong-Chae Kim
기타저자  
Yeong-Cheol Kim
기타저자  
Jun-Ho Choy
기본자료저록  
한국세라믹학회지 : 2001년 9월 (제38권 9호) 2001, 09
모체레코드  
모체정보확인
URL  
http://www.hanrimwon.co.kr
Control Number  
shingu:67040

MARC

 008011016s2001        ulkaILa                          kor
■022    ▼a12297801
■245    ▼a  Effects  of  Ti  and  TiN  Capping  Layers  on  Cobalt-silicided  MOS  Device  Characteristics  in  Embedded  DRAM  and  Logic▼dJong-Chae  Kim▼eYeong-Cheol  Kim▼eJun-Ho  Choy
■260    ▼a서울▼b한국세라믹학회▼c2001.
■300    ▼app.  782
■653    ▼aEFFECTS▼aTI▼aTIN▼aCAPPING▼aLAYERS▼aCOBALTSILICIDED▼aMOS▼aDEVICE▼aCHARACTERISTICS▼aEMBEDDED▼aDRAM▼aLOGIC
■700    ▼aJong-Chae  Kim
■700    ▼aYeong-Cheol  Kim
■700    ▼aJun-Ho  Choy
■773    ▼t한국세라믹학회지▼g2001년  9월  (제38권  9호)▼d2001,  09
■SIS    ▼aS012871▼b64638▼h1▼s2▼fP
■URL    ▼ahttp://www.hanrimwon.co.kr

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