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ECR CVD로 증착한 비정질 실리콘 박막의 H2/SiH4 와 기판온도 변화에 따른 광학적 전기적 특성
ECR CVD로 증착한 비정질 실리콘 박막의 H2/SiH4 와 기판온도 변화에 따른 광학적 전기적 특성 ...
ECR CVD로 증착한 비정질 실리콘 박막의 H2/SiH4 와 기판온도 변화에 따른 광학적 전기적 특성

Detailed Information

자료유형  
 보고서
서명/저자  
ECR CVD로 증착한 비정질 실리콘 박막의 H2/SiH4 와 기판온도 변화에 따른 광학적 전기적 특성 / 강문상
발행사항  
서울 : 인덕대학, 1997.
형태사항  
pp. 315-323
키워드  
ECR CVD 비정질 실리콘 박막 기판온도 광학적 전기적
기타저자  
강문상
기본자료저록  
논문집 - 인덕대학 : 1997년 1월 (제18집) 1997, 05
URL  
http://library.induk.ac.kr/web/
모체레코드  
모체정보확인
Control Number  
shingu:230485

MARC

 008050929s1997        ULKa    a                          KOR
■245    ▼aECR  CVD로  증착한  비정질  실리콘  박막의    H2/SiH4  와  기판온도  변화에  따른  광학적  전기적  특성▼d강문상
■260    ▼a서울▼b인덕대학▼c1997.
■300    ▼app.  315-323
■653    ▼aECR▼aCVD▼a비정질▼a실리콘▼a박막▼a기판온도▼a광학적▼a전기적
■700    ▼a강문상
■773    ▼t논문집  -  인덕대학▼g1997년  1월  (제18집)▼d1997,  05
■URL    ▼ahttp://library.induk.ac.kr/web/
■SIS    ▼aS026479▼b210155▼h3▼s2▼fD

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