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Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-Parallel Electrodes
Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-Parallel Electrodes
Detailed Information
- 자료유형
- 보고서
- 서명/저자
- Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-Parallel Electrodes / 김종탁
- 발행사항
- 강원도 : 상지영서대학, 1999.
- 형태사항
- pp. 377-385
- 키워드
- CHARACTERIZATION DIAMOND LIKE CARBON FILMS PREPARED PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION VERTICALPARALLEL ELECTRODES
- 기타저자
- 김종탁
- 모체레코드
- 모체정보확인
- Control Number
- shingu:218190
MARC
008041013s1999 ULKa a KOR■245 ▼aCharacterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-Parallel Electrodes▼d김종탁
■260 ▼a강원도▼b상지영서대학▼c1999.
■300 ▼app. 377-385
■653 ▼aCHARACTERIZATION▼aDIAMOND▼aLIKE▼aCARBON▼aFILMS▼aPREPARED▼aPLASMA▼aENHANCED▼aCHEMICAL▼aVAPOR▼aDEPOSITION▼aVERTICALPARALLEL▼aELECTRODES
■700 ▼a김종탁
■773 ▼t논문집 - 상지영서대학▼g1999년 7월 (제18집)▼d1999, 07
■URL ▼ahttp://lin2000.youngseo.ac.kr/
■SIS ▼aS023880▼b213938▼h3▼s2▼fD
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