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Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma
Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma / Tae ...
Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma

Detailed Information

자료유형  
 보고서
서명/저자  
Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma / Tae Hyung Kim
발행사항  
여주군 : 여주대학, 2002.
형태사항  
pp. 24-28
키워드  
ETCHING FILMS USING INDUCTIVELY COUPLED PLASMA
기타저자  
Tae Hyung Kim
기본자료저록  
논문집 - 여주대학(驪州大學) : 2002년 1월 (제10집 1호) 2002, 06
URL  
http://library.yeojoo.ac.kr
모체레코드  
모체정보확인
Control Number  
shingu:207854

MARC

 008040408s2002        ULKa    a                          KOR
■245    ▼aEtching  of  SrBi2Ta209  Thin  Films  Using  Inductively  Coupled  C12/Ar  and  C12/N2  Plasma▼dTae  Hyung  Kim
■260    ▼a여주군▼b여주대학▼c2002.
■300    ▼app.  24-28
■653    ▼aETCHING▼aFILMS▼aUSING▼aINDUCTIVELY▼aCOUPLED▼aPLASMA
■700    ▼aTae  Hyung  Kim
■773    ▼t논문집  -  여주대학(驪州大學)▼g2002년  1월  (제10집  1호)▼d2002,  06
■URL    ▼ahttp://library.yeojoo.ac.kr
■SIS    ▼aS022245▼b194677▼h3▼s2▼fD

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