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Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma
Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma
Detailed Information
- 자료유형
- 보고서
- 서명/저자
- Etching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma / Tae Hyung Kim
- 발행사항
- 여주군 : 여주대학, 2002.
- 형태사항
- pp. 24-28
- 기타저자
- Tae Hyung Kim
- 모체레코드
- 모체정보확인
- Control Number
- shingu:207854
MARC
008040408s2002 ULKa a KOR■245 ▼aEtching of SrBi2Ta209 Thin Films Using Inductively Coupled C12/Ar and C12/N2 Plasma▼dTae Hyung Kim
■260 ▼a여주군▼b여주대학▼c2002.
■300 ▼app. 24-28
■653 ▼aETCHING▼aFILMS▼aUSING▼aINDUCTIVELY▼aCOUPLED▼aPLASMA
■700 ▼aTae Hyung Kim
■773 ▼t논문집 - 여주대학(驪州大學)▼g2002년 1월 (제10집 1호)▼d2002, 06
■URL ▼ahttp://library.yeojoo.ac.kr
■SIS ▼aS022245▼b194677▼h3▼s2▼fD


