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Structural and Electrical Properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor
Structural and Electrical Properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor
Detailed Information
- Material Type
- 보고서
- ISSN
- 12297801
- Title/Author
- Structural and Electrical Properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor / Young Soo Yoon ; Tae Song Kim
- Publish Info
- 서울 : 한국세라믹학회, 2004.
- Material Info
- pp. 97-101
- Index Term-Uncontrolled
- STRUCTURAL ELECTRICAL PROPERTIES WOX FILMS DEPOSITED DIRECT CURRENT REACTIVE SPUTTERING NOX GAS SENSOR
- Added Entry-Personal Name
- Young Soo Yoon
- Added Entry-Personal Name
- Tae Song Kim
- Host Item Entry
- 한국세라믹학회지 : 2004년 2월 (제41권 2호) 2004, 02
- 모체레코드
- 모체정보확인
- Control Number
- shingu:206490
MARC
008040315s2004 ULKa a KOR■022 ▼a12297801
■245 ▼aStructural and Electrical Properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor▼dYoung Soo Yoon▼eTae Song Kim
■260 ▼a서울▼b한국세라믹학회▼c2004.
■300 ▼app. 97-101
■653 ▼aSTRUCTURAL▼aELECTRICAL▼aPROPERTIES▼aWOX▼aFILMS▼aDEPOSITED▼aDIRECT▼aCURRENT▼aREACTIVE▼aSPUTTERING▼aNOX▼aGAS▼aSENSOR
■700 ▼aYoung Soo Yoon
■700 ▼aTae Song Kim
■773 ▼t한국세라믹학회지▼g2004년 2월 (제41권 2호)▼d2004, 02
■URL ▼ahttp://www.kcers.or.kr
■SIS ▼aS021916▼b64638▼h4▼s2▼fP
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